Mainly suitable for various semiconductor materials such as silicon, germanium, silicon carbide, zinc oxide, etc. Stealth dicing is a dicing method that focuses laser light inside the workpiece to form a modified layer, and divides the workpiece into chips by expanding the adhesive film and other methods. It is suitable for 4-inch, 6-inch, and 8-inch wafers.













Processing size |
12 inches, 8 inches, 6 inches, 4 inches |
Processing method |
Cut/back cut |
Processing material |
Sapphire、Si、GaN and other brittle materials |
Wafer thickness |
100-1000um |
Maximum processing speed |
1000/s |
Positioning accuracy |
1um |
Repeat positioning accuracy |
1um |
Edge collapse |
< 5um |
Weight |
2800kg |


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