Laser invisible cutting, as a solution for laser cutting wafers, effectively avoids the problems of grinding wheel slicing. Laser invisible cutting is achieved by shaping a single pulse of pulsed laser through optical means, allowing it to pass through the surface of the material and focus inside the material. In the focal area, the energy density is high, forming a multi photon absorption nonlinear absorption effect, which modifies the material to form cracks. Each laser pulse acts equidistant, forming equidistant damage to form a modified layer inside the material. At the position of the modified layer, the molecular bonds of the material are broken, and the connections of the material become fragile and easy to separate. After cutting, the product is fully separated by stretching the carrier film, creating gaps between the chips. This processing method avoids damage caused by direct mechanical contact and rinsing with pure water. At present, laser invisible cutting technology can be applied to sapphire/glass/silicon and various compound semiconductor wafers.