




Model |
RYW-ETB05B |
RYW-ETB20 |
RYW-ETB05S |
RYW-ETB05 |
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Alignment Accuracy |
±0.5μm |
±2μm |
±0.5μm |
±2μm |
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Field of View |
0.5×0.3-5.4×4mm² |
1.2×0.9-14.4×10.8mm² |
0.5×0.3-5.4×4mm² |
1.2×0.9-14.4×10.8mm² |
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Substrate Size |
150mm/6-inch(300mm/12-inch) |
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Chip Size |
0.1~40mm |
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Axis Fine Adjustment |
±10° |
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Fine Adjustment Range |
2.5×2.5×10mm Res(0.5μm) |
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Pressure Range |
0.2~30N(Option 100N) |
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Heating Temperature |
350±1℃ (Option 450℃) |
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Heating and Cooling Rates |
Heat: 1~100℃/s; Cool: >5℃/s |
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Operating Range |
100mm×200mm |
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Device Dimensions |
L0.7×W0.6×H0.5m |
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Operation Type |
Semi-Automatic Rotary |
Manual Rotary |
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Device Weight |
120Kg |
100Kg |
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