Guangzhou Minder-Hightech Co.,Ltd.

Home
About Us
MH Equipment
Solution
Oversea Users
Video
Contact Us
Home> Laboratory Semiconductor Equipment
  • Spin Rinse Dryer Single Chamber
  • Spin Rinse Dryer Single Chamber

Spin Rinse Dryer Single Chamber

Product Description

Spin Rinse Dryer Single Chamber

Reasonable structure design and mature process technology
Good drying effect and high process cleanliness
Small vibration, good reliability, and applicable to thin plates
Simple operation, convenient maintenance, stable and reliable operation of the whole machine

Equipment function

The equipment is divided into single cavity and double cavity, which is used for wet drying of various semiconductor application materials such as 1-inch, 2-inch, 4-inch, 5-inch, 6-inch, 8-inch, 12-inch standard size wafers, non-standard size wafers and square wafers, silicon wafers, potassium nitride, gallium arsenide, sapphire, mask and so on.

Technical Parameter

Wafer size: applicable to 1-12 inch production line
Fragment rate: 1/10000

Application area

SPM acid cleaning, organic cleaning, developing, degumming, ITO etching, BOE etching, uniform gluing and other process wafer drying
Process Parameters
Workmanship
STEP
Step1
Step2
Step3
Step4
Step5
Step6
Step7
Step8
Step9
Step10
Time (s)
0-999
0-999
0-999
0-999
0-999
0-999
0-999
0-999
0-999
0-999
speed (r/min)
0-2500
0-2500
0-2500
0-2500
0-2500
0-2500
0-2500
0-2500
0-2500
0-2500
Flushing
Optional
Optional
Optional
Optional
Optional
Optional
Optional
Optional
Optional
Optional
Purge
Optional
Optional
Optional
Optional
Optional
Optional
Optional
Optional
Optional
Optional
nitrogen
Optional
Optional
Optional
Optional
Optional
Optional
Optional
Optional
Optional
Optional
Nitrogen heating
Optional
Optional
Optional
Optional
Optional
Optional
Optional
Optional
Optional
Optional
Cavity heating
Optional
Optional
Optional
Optional
Packing & Delivery
To better ensure the safety of your goods, professional, environmentally friendly, convenient and efficient packaging services will be provided.
Company Profile
Minder-Hightech is sales and service representative in semiconductor and electronic product industry equipment. Since 2014,the company is committed to providing customers with Superior, Reliable, and One-Stop Solutions for machinary equipment.
FAQ
1. About Price:
All of our prices are competitive and negotiable. The price varies depending on the configuration and customization complexity of your device.

2. About Sample:
We can provide sample production services for you, but you may provide some fees.

3. About Payment:
After the plan is confirmed, you need to pay us a deposit first, and the factory will start preparing the goods. After the equipment is ready and you pay the balance, we will ship it.

4. About Delivery:
After the equipment manufacturing is completed, we will send you the acceptance video, and you can also come to the site to inspect the equipment.

5. Installation and Debugging:
After the equipment arrives at your factory, we can dispatch engineers to install and debug the equipment. We will provide you with a separate quotation for this service fee.

6. About Warranty:
Our equipment has a 12-month warranty period. After the warranty period, if any parts are damaged and need to be replaced, we will only charge the cost price.

Inquiry

Inquiry Email WhatsApp WeChat
Top
×

Get in touch