Model |
MD-FXY12 Small size ion sputter coater |
Vacuum Chamber |
Ф100mm*H130mm |
Specimen stage |
Ф40mm(6 sample cells at the same time) |
Gold sputtering target |
Ф57mm |
Vacuum gauge |
Pirani |
Vacuum pump |
Rotation vane pums: 2L / s |
Vacuum protection point |
20Pa |
Working gas |
Air or Ar with micro adjustable |
Sputtering voltage |
1.6KV |
Net weight |
20kg+40kg |
Compliance |
CE |
MD-FXY12 host |
1 set |
Mechanical pump |
1 set |
pump-line |
1 |
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