









| Grindable wafer | Size | Inches | 4,5,6,8 | 
| Rubbing way | - | Vertical plunge grinding method | |
| Grinding wheel spindle | Types | - | Air bearings | 
| Quantity | - | 1 | |
| Speed | rpm | 0~5000 | |
| Output Power | Kw | 5.5/7.5 | |
| Stroke | mm | 150 | |
| Feed Speed | um/s | 0.01~100 | |
| Fast forward speed | mm/min | 300 | |
| Resolution | um | 0.1 | |
| Workpiece axis | Type | - | Ball bearings | 
| Quantity | - | 1 | |
| Speed | rpm | 0~300 | |
| Power | kw | 0.75 | |
| Suction cup type | - | Microporous ceramics | |
| Wafer suction method | - | Vacuum adsorption | |
| Wafer transfer | - | Manual | |
| Other functions | Wafer centering | - | - | 
| Wafer cleaning | - | - | |
| Suction cup cleaning | - | - | |
| Grinding wheel | mm | Φ200 | |
| Online  measurement | Measurement range | um | 0~1800 | 
| Resolution | um | 0.1 | |
| Repeat accuracy | um | ±0.5 | |
| Machining  accuracy | Intra-wafer accuracy (TTV) | um | ≤2 | 
| Inter-wafer accuracy (WTW) | um | ±3 | |
| Surface roughness (Ry) | um | 0.1(2000#finish) | |
| Appearance | Appearance coloring | um | Orange Pattern | 
| Dimensions(W×D×H) | mm | 690×1720×1780 | |
| Weight | kg | 1400 | 
| Grindable wafer | Size | Inches | 6,8,12 | 
| Rubbing way | - | Vertical plunge grinding method | |
| Grinding wheel spindle | Types | - | Air bearings | 
| Quantity | - | 1 | |
| Speed | rpm | 0~5000 | |
| Output Power | Kw | 5.5/7.5 | |
| Stroke | mm | 150 | |
| Feed Speed | um/s | 0.01~100 | |
| Fast forward speed | mm/min | 300 | |
| Resolution | um | 0.1 | |
| Workpiece axis | Type | - | Ball bearings | 
| Quantity | - | 1 | |
| Speed | rpm | 0~300 | |
| Suction cup type | - | Microporous ceramics | |
| Wafer suction method | - | Vacuum adsorption | |
| Wafer transfer | - | Manual | |
| Other functions | Wafer centering | - | - | 
| Wafer cleaning | - | - | |
| Suction cup cleaning | - | - | |
| Grinding wheel | mm | Φ300 | |
| Online  measurement | Measurement range | um | 0~1800 | 
| Resolution | um | 0.1 | |
| Repeat accuracy | um | ±0.5 | |
| Machining  accuracy | Intra-wafer accuracy (TTV) | um | ≤3 | 
| Inter-wafer accuracy (WTW) | um | ±3 | |
| Surface roughness (Ry) | um | 0.13(2000#finish) | |
| Appearance | Appearance coloring | um | Orange Pattern | 
| Dimensions(W×D×H) | mm | 790×2170×1830 | |
| Weight | kg | 1800 | 





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