Model |
MDWX-WI8100 |
Loader |
Minder-Hightech |
Optical system |
Minder-Hightech |
Software function |
Defect map coordinate reading (corresponding to KLA, Camtek, etc.), and automatic alignment |
Defect map information screening and automatic photography, archiving |
|
Automatic image measurement: CD, Overlay |
|
Defect map image database |
|
Automatic light source adjustment system/automatic image camera function/automatic positioning measurement |
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