MDICP-5000F Fully Automatic ICP Etching Machine / Semiconductor equipment Inductively Coupled Plasma , China MDICP-5000F Fully Automatic ICP Etching Machine / Semiconductor equipment Inductively Coupled Plasma Manufacturers, Suppliers, Factory

Product Description

MDICP-5000F Fully automatic ICP etching machine

Executive summary

The equipment is a two chamber vacuum system. One chamber is the injection sampling chamber and the other is the etching chamber. A vacuum lock is installed between the injection sampling chamber and the etching chamber, and the injection sampling is transported by manipulator.
The equipment is mainly composed of vacuum system, gas circuit system, electrical system, control system, cooling system, film feeding and taking mechanism, alarm system, etc.

Vacuum system

The system consists of a molecular pump with a pumping speed of 600 L / S + an imported vacuum dry pump with a pumping speed of L / s to pump the etching chamber to high vacuum. An electric dynamic pressure regulating valve is installed between the molecular pump and the etching chamber. The imported dry pump is the pre pumping pump of the etching chamber and the front stage pump of the molecular pump. Use another mechanical pump with pumping speed of L / s to vacuum the sample chamber. Stainless steel bellows are used for connection between mechanical pump and vacuum chamber and molecular pump, and electromagnetic pneumatic block valve is installed.

Constant pressure control system

The equipment is equipped with a downstream constant pressure control system, and an electric adjustable valve is installed in the air extraction pipeline. Through the measurement of film gauge (imported parts), the adjustable valve is controlled to make the vacuum chamber reach constant pressure, so as to improve the process stability.

Constant pressure control system

Gas circuit system

Two sets of RF power supply with automatic matching.

Alarm system

Safety requirements for equipment.

Specification

Name	Spc	Brand	No./Set	Note
Etching chamber, air extraction pipeline, observation window, reserved interface, etc	Standard	JSWN	1	Anticorrosive
Frame, electric cabinet, seals, standard parts, etc	Standard	JSWN	1
Etching chamber cover lifting system	Standard	JSWN	1	Anticorrosive
Etching electrode and cooling system	Standard	JSWN	1	Anticorrosive
Molecular pump (pumping speed 600 L / s)	FF620/150	KYKY	1	Anticorrosive
Inlet dry pump (pumping speed 9 L / s)	XDS-35I	EDWARDS	1	Anticorrosive
Mechanical pump (pumping speed 9 L / s)	TRP-36	BWVAC	1
Electric regulating gate valve	DCQ-150	JSWN	1	Anticorrosive
Pneumatic bellows stop valve	KF40	JSWN	3	Anticorrosive
Film gauge	KF16	INFICON	1	Anticorrosive
Mass flow controller	D07	Sevenstar	4	Anticorrosive
Pneumatic diaphragm valve	1/4″VCR	-	4	Anticorrosive
Stainless steel pipe, pipe joint, etc	1/4″VCR	-	4	Anticorrosive
RF power supply / automatic matcher	-	China(OptionalCROWN1310)	1
RF power supply / automatic matcher	-	China(OptionalCROWN1310)	1
Composite vacuum gauge	ZDF	RB	1
IPC	2U	China	1
LCD touch screen	17inch	China	1
PLC control system	S7-200	Siemens	1
Electric drive control system	Standard	JSWN	1
Cooling water detection and pipeline system	Standard	JSWN	1
Compressed air detection and pipeline system	Standard	JSWN	1
Cooling circulating water machine	HX	China	1
Etching injection chamber	Standard	JSWN	1
Vacuum lock	SMC	SMC	1
Manipulator control system	SMC	SMC	1

Mail technical parameter

1. Limit vacuum: Etching chamber 9.0×10-5Pa (Indoor humidity≤55%)
Injection sampling chamber 6.0×10-1Pa
2. Etching material: Ⅲ、ⅤMaterial、Si 、SiO2,etc
3. Etching rate: ~ 1μ/min
4. Etching uniformity: ≤±5％(φ125mm range)
6. Electrode size: φ200mm

Packing & Delivery

To better ensure the safety of your goods, professional, environmentally friendly, convenient and efficient packaging services will be provided.

Company Profile

We have 16 years of experience in equipment sales. We can provide you with One-stop Semiconductor Front-end and Back end Package Line equipments professional solution from China.

MDICP-5000F Fully Automatic ICP Etching Machine / Semiconductor equipment Inductively Coupled Plasma supplier

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MDICP-5000F Fully Automatic ICP Etching Machine / Semiconductor equipment Inductively Coupled Plasma