





| Vacuum plasma host unit (60) | ||||
| Equipment size | L 950×W 900×H 1650mm | |||
| weight | 350Kg | |||
| Demand power supply | AC380V, 50 / 60Hz, 5 line, 16A (total open type above C) | |||
| Plasma generator specification | ||||
| power | radio frequency | intermediate frequency | ||
| 0~600W | 0-1000W | |||
| supply frequency | 13.56MHz | 40 K Hz | ||
| Vacuum system | ||||
| vacuum pump | Double-stage rotary pump (oil pump): 40m3/h | |||
| vacuum pipeline | All stainless steel line, as well as high strength vacuum bellows | |||
| material quality | Aluminum alloy (customizable stainless steel cavity) | |||
| thickness | 25mm | |||
| tightness | Military-grade welding seal | |||
| Internal dimensions of the cavity | 375*375*430mm(Width* high * depth) | |||
| Electric plate effective size | 247*281mm (wide* depth) | |||
| Available space spacing | 22mm | |||
| Electroplate arrangement | Horizontal layout, can be active extraction | |||
| trays | Standard set, material optional (aluminum, steel wire mesh) | |||
| work space | 6 layer | |||
| process gas | ||||
| Flow range | 0~300SCCM | |||
| Process gas gas route | Standard with two ways, can be customized. The process gas pipeline is made of ferrofllon | |||
| navar | ||||
| SC | PLC | |||
| interactive mode | 7-Inch touch screen | |||







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