Guangzhou Minder-Hightech Co.,Ltd.
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Guangzhou Minder-Hightech Co.,Ltd.
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  • Mask Aligner Lithography Machine
  • Mask Aligner Lithography Machine
  • Mask Aligner Lithography Machine
  • Mask Aligner Lithography Machine
  • Mask Aligner Lithography Machine
  • Mask Aligner Lithography Machine
  • Mask Aligner Lithography Machine
  • Mask Aligner Lithography Machine
  • Mask Aligner Lithography Machine
  • Mask Aligner Lithography Machine
  • Mask Aligner Lithography Machine
  • Mask Aligner Lithography Machine

Mask Aligner Lithography Machine

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Products Description

Mask Aligner Lithography Machine

Mask Aligner Also known as: mask alignment exposure machine, exposure system, lithography system, etc., is the core equipment for manufacturing chips. It uses the technology similar to photo printing to print the fine patterns on the mask onto the silicon wafer by light exposure.
Characteristic
——High uniformity fly-eye exposure head / air flotation leveling mechanism / reliable vacuum clamping exposure.
——Above feature make sure the high resolution and high uniformity.
——Aligning method by mask keep stable and substrate feeding, which make sure the consistency of the guide gravity and the force.
——Using gapless straight guide, high precision, fast speed.

Manufacturing high-precision alignment system needs to have nearly perfect precision mechanical process. Another technical problem of alignment system is alignment microscope. In order to enhance the field of view of microscope, many high-end lithography machines use LED lighting. There are two sets of alignment system with focusing function. It is mainly composed of two eyes and two fields of view aiming at the main body of the microscope, one pair of eyepiece and one pair of objective lens (lithography
machine usually provides eyepiece and objective lens with different magnification for users). The function of CCD alignment system is to enlarge the alignment marks of mask and sample and image them on the monitor.
Specification
Manufacturer
Minder-hightech
Minder-hightech
Minder-hightech
Minder-hightech
Model
MD-G25A
MD-G25D
MD-G31
MD-G33
Exposure head NO.
1 Exposure head
1 Exposure head
2 Exposure head
2 Exposure head
Type of light source
Mercury lamp source
Ultraviolet light source
Mercury lamp source
Ultraviolet light source
Exposure area
≤∅100mm
Φ100mm
≤∅120mm
≥∅115mm
Exposure mode
Contact exposure
micro-force paralleling technology
micro-force paralleling technology
micro-force paralleling technology
Exposure unevenness
∅100mm<±4%
≤±3%
∅100mm≤±6%
≤±3%Exposure intensity≥20mw/cm2(365nm,
404nm,435nmCombined UV
Substrate thickness
1-5mm
≤5 mm
0.1-1mm
≤5 mm
Exposure resolution
3μm
1 μm
5 μm
1 μm
Lighting range
∅115mm
∅120mm
∅120mm
∅130mm
Camera system
Binocular separation system
dual-field CCD system
dual-field CCD system
dual-field CCD system
Microscope system
50-375 continuous zoom
91x ~ 570X continuous zoom (objective lens 1.6x ~ 10x continuous zoom), the adjustable range of double objective lens distance is
50mm ~ 120mm
0.7-4.5 continuous zoom
60x, 120x continuous zoom
(objective magnification 2x, 4x two), double objective adjustable distance 25mm-70mm
Company Profile
Minder-Hightech is sales and service representative in semiconductor and electronic product industry equipment. Since 2014，the company is committed to providing customers with Superior, Reliable, and One-Stop Solutions for machinary equipment.
FAQ
1. About Price:
All of our prices are competitive and negotiable. The price varies depending on the configuration and customization complexity of your device.

2. About Sample:
We can provide sample production services for you, but you may provide some fees.

3. About Payment：
After the plan is confirmed, you need to pay us a deposit first, and the factory will start preparing the goods. After the equipment is ready and you pay the balance, we will ship it.

4. About Delivery:
After the equipment manufacturing is completed, we will send you the acceptance video, and you can also come to the site to inspect the equipment.

5. Installation and Debugging:
After the equipment arrives at your factory, we can dispatch engineers to install and debug the equipment. We will provide you with a separate quotation for this service fee.

6. About Warranty:
Our equipment has a 12-month warranty period. After the warranty period, if any parts are damaged and need to be replaced, we will only charge the cost price.

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