
|  Model |  MDTS-WT2200 | 
|  Number of thinning axes |  2 | 
|  Number of workbenches |  3, Index method | 
|  Grinding wheel spindle |  Number of air spindles: 2  Spindle motor: 7.5kW variable frequency motor Speed: 0~6000rpm, steplessly adjustable Grinding wheel specification: Φ203mm Grinding wheel type: diamond grinding wheel | 
|  Grinding wheel feeding system |  Quantity: 2 sets  Feed system control method: LM guide rail and ball screw combination Drive motor: servo motor Minimum feed speed: 0.1um/sec Maximum feed speed: 50mm/sec | 
|  Workbench |  Quantity: 3, Index mode  Spindle motor: Servo motor Speed: 0~300rpm, steplessly adjustable Adsorption method: Vacuum adsorption | 
|  Workbench turntable |  Drive mode: servo motor  Rotation range: 0~240° Positioning shape: sensor assisted positioning | 
|  Automatic thickness  measurement system |  Measurement method: IPG contact online real-time measurement  Number of measuring heads: 2 Measuring sensor: 0.1um level sensor | 
|  Automatic loading/ unloading system |  Box type: 6-8inch Cassette, 25 layers Automatic loading/unloading method: wafer manipulator is used to ensure thin wafers are transported without damage Wafer thickness: 150um-1000um | 
|  Workbench cleaning function |  Cleaning method: Oilstone polishing &DI water+air two-fluid flushing | 
|  Automatic cleaning/ drying system |  Cleaning: DIW nozzle cleaning  Drying method: Blowing +drying Speed: max1000rpm steplessly adjustable | 
|  Static elimination system |  Ion bar orion fan | 
|  Spindle chiller |  Temperature: 18-22°C  Flow rate: 4~8L/min | 
|  Control system |  Control system: PCcontrol system, touch screen 3-coloralarm light Chinese/English human-machineinterface | 
|  Maximum wafer size |  Maximum compatible with 8 inches | 
|  Speed range |  0~6000 RPM | 
|  Z-axis travel |  160mm | 
|  Z-axis feed speed |  0.1~100um/sec | 
|  Z-axis fast retract speed |  50mm/sec | 
|  Z-axis resolution |  0.1um | 
|  Online thickness measurement range |  0~1800um | 
|  Online thickness measurement resolution |  0.1um | 


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