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  • Full Automatic Wafer Thinning Machine
  • Full Automatic Wafer Thinning Machine

Full Automatic Wafer Thinning Machine

Model: MDTS-WT2200

Product Description
MDTS-WT2200
Fully Automatic Wafer Thinning Machine
Full Automatic Wafer Thinning Machine supplier
Feature
1.Excellent compatibility:Maximum8-inch compatibility
2.Operation mode:Fully automatic mode processing
3.Automaticmode fordrying inand out, with cleaning and drying functions
4.Using specialized grinding wheels
5.Equipped with wheel overload waiting function
Specification
Model
MDTS-WT2200
Number of thinning axes
2
Number of workbenches
3, Index method
Grinding wheel spindle
Number of air spindles: 2
Spindle motor: 7.5kW variable frequency motor
Speed: 0~6000rpm, steplessly adjustable
Grinding wheel specification: Φ203mm
Grinding wheel type: diamond grinding wheel
Grinding wheel feeding system
Quantity: 2 sets
Feed system control method: LM guide rail and ball screw
combination
Drive motor: servo motor
Minimum feed speed: 0.1um/sec
Maximum feed speed: 50mm/sec
Workbench
Quantity: 3, Index mode
Spindle motor: Servo motor
Speed: 0~300rpm, steplessly adjustable
Adsorption method: Vacuum adsorption
Workbench turntable
Drive mode: servo motor
Rotation range: 0~240°
Positioning shape: sensor assisted positioning
Automatic thickness
measurement system
Measurement method: IPG contact online real-time measurement
Number of measuring heads: 2
Measuring sensor: 0.1um level sensor
Automatic loading/
unloading system
Box type: 6-8inch Cassette, 25 layers
Automatic loading/unloading method: wafer manipulator is used to ensure thin wafers are transported without damage
Wafer thickness: 150um-1000um
Workbench cleaning function
Cleaning method: Oilstone polishing &DI water+air two-fluid flushing
Automatic cleaning/
drying system
Cleaning: DIW nozzle cleaning
Drying method: Blowing +drying
Speed: max1000rpm steplessly adjustable
Static elimination system
Ion bar orion fan
Spindle chiller
Temperature: 18-22°C
Flow rate: 4~8L/min
Control system
Control system: PCcontrol system, touch screen 3-coloralarm light
Chinese/English human-machineinterface
Maximum wafer size
Maximum compatible with 8 inches
Speed range
0~6000 RPM
Z-axis travel
160mm
Z-axis feed speed
0.1~100um/sec
Z-axis fast retract speed
50mm/sec
Z-axis resolution
0.1um
Online thickness measurement range
0~1800um
Online thickness measurement resolution
0.1um
Packing & Delivery
Full Automatic Wafer Thinning Machine factory
Full Automatic Wafer Thinning Machine factory
FAQ
1. About Price:
All of our prices are competitive and negotiable. The price varies depending on the configuration and customization complexity of your device.

2. About Sample:
We can provide sample production services for you, but you may provide some fees.

3. About Payment:
After the plan is confirmed, you need to pay us a deposit first, and the factory will start preparing the goods. After the
equipment is ready and you pay the balance, we will ship it.

4. About Delivery:
After the equipment manufacturing is completed, we will send you the acceptance video, and you can also come to the site to inspect the equipment.

5. Installation and Debugging:
After the equipment arrives at your factory, we can dispatch engineers to install and debug the equipment. We will provide you with a separate quotation for this service fee.

6. About Warranty:
Our equipment has a 12-month warranty period. After the warranty period, if any parts are damaged and need to be replaced, we will only charge the cost price.

Inquiry

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