





|
PLASMA source
|
RF+BIAS
|
||
|
Power
|
1000W
|
1000W
|
|
|
600W
|
600W
|
||
|
Applicable scope
|
4-8 inches
|
||
|
Single processing slice count
|
one
|
||
|
Appearance dimensions
|
1140mm x 1050mm x 1620mm
|
||
|
System control
|
Industrial control system
|
||
|
Automation level
|
Manual
|
||








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