MDZY-DMD-MLL200 DMD Maskless Lithography Machine , China MDZY-DMD-MLL200 DMD Maskless Lithography Machine Manufacturers, Suppliers, Factory

Product Description

MDZY-DMD-MLL200
DMD Maskless Lithography Machine

The MDZY-DMD-MLL200 is a maskless lithography machine based on DMD (Digital Micromirror Device) technology. By replacing traditional masks with a DMD, it allows for rapid and flexible design of lithographic patterns, supporting 2D and 8-bit grayscale lithography. It can meet any micron-scale lithography requirements and is widely used in various fields such as MEMS and microfluidics.

Features

1. Compact desktop design
2. High-power, high-uniformity LED exposure light source
3. Green light guided exposure
4. Automatic image focusing using a CCD camera
5. High-precision linear motor stage
6. Easy-to-use software interface

Parameters

UV light source center wavelength	405nm
Exposure uniformity	More than 90%
Minimum feature linewidth	0.5um
Single-pass writing field exposure area	0.16*0.16mm (@0.5um)
Writing speed	80 mm²/min (1um feature line width)
Supported image formats	DXF, GDS, bmp, png, etc.

Configuration

Configuration	Basic version	Professional version
Light source	High-power LED: 405nm
DMD chip	DLP6500
Single-field exposure area	0.160.16mm (@0.5um), 0.40.4mm (@0.7um), 0.80.8mm (@1um), 1.61.6mm (@2um)
Camera	Large-area microscope camera (supports size measurement)
Minimum equidistant line width	0.8 µm	0.5μm
Stitching accuracy	±0.3 µm	±0.3μm
Overlay accuracy	±0.5 µm	±0.5μm
Writing speed	20 mm²/min (1 µm feature linewidth)	80 mm²/min (1μm feature linewidth)
Motion stage	High-precision linear motor (repeatable positioning accuracy ±0.25µm), leveling mechanism, manual rotary stage	High-precision linear motor (repeatable positioning accuracy ±0.25µm), leveling mechanism, electric rotary stage
Objective lens changer	Manual objective lens switching	Motorized objective lens switching
Focusing module	CCD image autofocus	Laser active focusing
Supported wafer sizes	4 inch	4-inch/8-inch
Sample thickness	0-10mm	0-10 mm

Application Cases

Microfluidic Chip

DMD UV lithography for overlay functionality

Tellurium nanogrid etching followed by electrode overlay

Grayscale lithography of Fresnel lenses, 3D grayscale lithography for Fresnel lenses, showing continuous step changes in the cross-sectional image from the scanning electron microscope.

Two-dimensional material electrodes, two-dimensional material electrodes after evaporation and lift-off, evaporated electrodes are Ti/Au/Ti (12 nm total)

DMD UV and electron beam combined lithography

Softward

Users can complete all lithography operations from the main interface without any pop-up windows.

Image cropping module:

Includes functions such as custom cropping, automatic filling, color inversion, and anti-aliasing.

Object Binding:

Users can set object bindings at any location on the sample surface and simultaneously preview the correspondence between any sub-image in the full-field image and the sample surface, enabling precise overlay.

In-situ Drawing Function:

Graphics can be drawn directly on the microscopic image and projected onto the sample to achieve in-situ photolithography.

Equipment Real Shoots

Packing & Delivery

Company Profile

Since 2014，Minder-Hightech is sales and service representative in Semiconductor and Electronic product industry equipment. We are committed to providing customers with Superior, Reliable, and One-Stop Solutions for machinary equipment. Until today, our brand's products have spread to major industrialized countries around the world, helping customers improve efficiency, reduce costs, and improve product quality.

FAQ

1. About Price:
All of our prices are competitive and negotiable. The price varies depending on the configuration and customization complexity of your device.

2. About Sample:
We can provide sample production services for you, but you may provide some fees.

3. About Payment:
After the plan is confirmed, you need to pay us a deposit first, and the factory will start preparing the goods. After the equipment is ready and you pay the balance, we will ship it.

4. About Delivery:
After the equipment manufacturing is completed, we will send you the acceptance video, and you can also come to the site to inspect the equipment.

5. Installation and Debugging:
After the equipment arrives at your factory, we can dispatch engineers to install and debug the equipment. We will provide you with a separate quotation for this service fee.

6. About Warranty:
Our equipment has a 12-month warranty period. After the warranty period, if any parts are damaged and need to be replaced, we will only charge the cost price.

7. After-sale Service:
All machines have a warranty period of over one year. Our technical engineers are always online to provide you with equipment installation, debugging, and maintenance services. We can provide on-site installation and debugging services for special and large equipment.

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MDZY-DMD-MLL200 DMD Maskless Lithography Machine