




Chip material |
Si and others |
Chip size |
0.3~30mm thickness:0.05 ~1.0 [mm] |
Supply methods |
2,4 Inch tray (waffle tray, gel-pak, metal tray etc) |
Substrate material |
SUS, Cu, Si, work piece, ceramic and others |
Tray amounts |
2inch tray up to 8, or 4inch tray up to 2;Tray can be freely set for chip or substrate. |
Substrate outer size |
15~50 [mm]& 8 [inch] wafer |
Substrate thickness |
Flat shaped base plate 0.1~3.0[mm]; Tube shaped bottom plate:A:0.1~2[mm] B:≤5[mm],C:≤7[mm] The minimum distance from the chip to the inner wall of the can D: 21mm |
UPH |
Approx 12 [sec/cycle] [Conditions of cycle time] |
Z axis |
Resolution |
0.1[μ m] |
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Movable range |
200[mm] |
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Speed |
Max.250[mm/sec] |
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θ axis |
Resolution |
0. 000225[°] |
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Movable range |
±5[°] |
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Chip holding |
Vacuum suction method |
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Recipe change |
ATC (automatic tool changer) method Maximum number of jigs to be changed: 20x20[mm] 6 types *2 types when 30x30[mm] (option) is used. |
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Set range |
Low load range:0.049 to 4.9[N](5 to 500[g]) High load range:4.9 to 1000[N](0.5 to 102[kg]) * Load control that covers both range is not possible. * Ultrasonic horn is only for high-load area |
Pressure accuracy |
Low load range: ±0.0098[N](1[g]) High load range: ±5[%](3σ) * Both accuracies are for RT actual load. |
Heating method |
Pulse heat method (Ceramic heater) |
Set temperature |
RT~450[°C] (1[°C] step) |
Temperature rising speed |
Max80[°C/sec] (without ceramic jig) |
Temperature distribution |
+5[°C] (30x30[mm] area) |
Cooling function |
With heat tool, work cooling function |
Oscillation frequency |
40[kHz] |
Vibration range |
Approximately 0.3 to 2.6[µ m] |
Heating method |
Constant heat method (ultrasonic horn) |
Set temperature |
RT~250[°C] (1[°C] step) |
Tool size |
M6 tool replacement types (screw in type) *Needs to change to the rigid type for more than 7x7[mm] chip size. |
Others |
Need to replace with pulse heat head. |
Mounting area |
50×50 [mm] |
Heating method |
Ceramic heater |
Set temperature |
RT~450[°C] (1[°C] step) |
Temperature distribution |
+5[°C] |
Temperature rising speed |
Max70[°C/sec] (without ceramic jig) |
Cooling function |
Available |
Work holding |
Vacuum suction method |
Recipe change |
Jig change |
XY stage |
Constant heater |
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Stage for main bonding |
Mounting area |
200×200 [mm] (48 [inch] area) |
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Heating method |
Constant heat |
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Set temperature |
200×200 [mm]: RT to 250[°C] (1[°C] step) |
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Temperature distribution |
±5% (200×200 [mm]) |
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Work holding |
Vacuum suction method |
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Recipe change |
Jig change |
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