Product Introduction
MDSM-VP-CG series probe station can provide IV/CV characteristic test, RF test, photoelectric test, electromagnetic transport characteristic, and Hall effect test for device and material characterization in the environment of ultra-high vacuum and high and low temperatures.
By setting up components such as a vacuum chamber and radiation protection screen, integrated high temperature, low temperature, vacuum, and other testing conditions can effectively meet and provide a stable testing environment for semiconductor devices.
Product Features
1.Can support 4.2K-473K temperature
2.Anti-radiation screen design to improve sample temperature uniformity and accuracy
3.Probe heat sink design to ensure accurate probe drop
4.Upgradable loading magnetic field
5.Flexible and scalable test application configuration
6.Automatic refrigerant flow control, automatic precise temperature control
Product Parameters
Model |
MDSM-VP-CG-O-2 |
MDSM-VP-CG-O-4 |
MDSM-VP-CG-C-2 |
|
Chuck |
Size |
2inch |
4inch |
2inch |
Sample fixing method |
Vacuum thermal grease/spring press |
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Vacuum degree |
10^-10torr maximum vacuum |
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Optical properties |
Microscope travel |
R axis 360°+moving axis 100mm |
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Gain |
Zoom: 7:1, resolution 4μm (magnification 216X) or metallographic microscope (20X~1000X) |
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Dimensions of observation window |
2inch |
4inch |
2inch |
|
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Temperature control specifications |
CCD pixel |
50W（simulation）/200W（digital）/500W（digital） |
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Cooling method |
Liquid nitrogen/liquid helium |
Refrigeration Compressors |
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Control method |
Open cycle manual/automatic refrigerant flow control |
Closed loop automatic control |
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Range |
77K~473K/4.2K~473K |
7.3K~473K |
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Resolution |
0.001K |
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Stability |
4.2K±0.2K 77K±0.1K 373K±0.08K 473K±0.1K |
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Probe specification |
Probe number |
The number of various probes can be expanded up to 6 |
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Probe regulation |
Vacuum bellows external adjustment, manual control |
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Dot accuracy |
2μm |
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Current leakage |
1pA/V @25℃，100fA/V @25℃ |
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Connector type |
Triaxial/SMA/K/Fiber Interface |
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Guangzhou Minder-Hightech Co.,Ltd.
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