







Chamber |
size |
Mini Antechamber |
Main Antechamber |
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diameter 150mm, length 330mm |
diameter 360mm, length 600 mm (optional diameter 390mm) |
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material |
304 stainless steel |
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surface |
wire drawing inner surface, painted exterior surface |
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Accessories |
tray |
stainless steel mirror processing, sliding tray |
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chamber door |
double doors |
double doors, anodised aluminum, with booster structur |
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pressure gage |
Wika vacuum oil gauge or digital display |
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Control |
operation |
PLC control or manual operation |
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Type specification |
Single side Single station |
Single side three gloves |
Single side double stations |
Single side double stations |
Double sides double stations |
Double sides four stations |
Double sides four stations |
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length*height*width(mm) |
1200x900X750 |
1500x900X750 |
1800x900X750 |
2400x900X750 |
1200x900X1000 |
1800x900X1000 |
2400x900X 1000 |
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Chamber material |
304 stainless Steel |
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Material thickness |
3mm |
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Rack height |
950mm |
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Main Antechamber |
Φ360XΦ600 or Φ390X600 mm |
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Mini Antechamber |
Φ150 X 330 mm |
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Gloves |
2 PCS |
3 PCS |
4 PCS |
4 PCS |
4 PCS |
4 PCS |
8 PCS |
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Glove part material |
Alumina Oxide/POM |
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Volume |
0.8 ㎡ |
1.0 ㎡ |
1.2 ㎡ |
1.6 ㎡ |
1.1 ㎡ |
1.6 ㎡ |
2.2 ㎡ |
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Leak rate |
0.001vol%/h |
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H2O inder |
<0.1ppm |
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02 inder |
<0.1ppm |
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