





| Project | Content | 
| Product Type | 6", 8", 12" frame wafer | 
| 2D Inspection ltems | Foreign objects, residual glue, particles, scratches, cracks, contamination, CP deviation, excessive area, etc Cutting channel deviation and chipping | 
| Cutting Path Inspection Items | 6", 8", 12" frame cassetee | 
| Lens and Resolution | 2x(2.75um)/3.5x(1.57um)/ 5x(1.1um)/7.5x(0.73um)/10x(0.55um) | 
| Precision | 0.55μm/pixel | 
| Optional and Customized | INK module, IR module | 







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