Guangzhou Minder-Hightech Co.,Ltd.
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Guangzhou Minder-Hightech Co.,Ltd.
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  • Material etching Deposition Reaction Ion Etching Machine RIE
  • Material etching Deposition Reaction Ion Etching Machine RIE
  • Material etching Deposition Reaction Ion Etching Machine RIE
  • Material etching Deposition Reaction Ion Etching Machine RIE
  • Material etching Deposition Reaction Ion Etching Machine RIE
  • Material etching Deposition Reaction Ion Etching Machine RIE
  • Material etching Deposition Reaction Ion Etching Machine RIE
  • Material etching Deposition Reaction Ion Etching Machine RIE
  • Material etching Deposition Reaction Ion Etching Machine RIE
  • Material etching Deposition Reaction Ion Etching Machine RIE
  • Material etching Deposition Reaction Ion Etching Machine RIE
  • Material etching Deposition Reaction Ion Etching Machine RIE

Material etching Deposition Reaction Ion Etching Machine RIE

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Product Description

RIE Reaction Ion Etching Machine

The research applications of RlE reactive ion etching machines in the semiconductor manufacturing and micro-nano processing fields are mainly reflected in the processing o nanoscale structures, etching of new materials, manufacturing of complex devices, and breakthroughs in interdisciplinary technologies. Its core value lies in achieving high-precision and high-selectivity material removal through the coordinated control of physical bombardment and chemical reactions. Support the exploration of the cutting-edge of semiconductor technology and the innovation of devices.

Equipment Features:

1. High precision and anisotropy: It can etch out graphics with steep side walls and precise dimensions.
2. Good uniformity and repeatability: suitable for large-scale production.
3. Wide material applicability: By choosing different gas combinations, various materials (semiconductors, dielectrics, metals, etc.) can be etched.
4. High selectivity ratio: It can precisely etch specific materials without causing significant damage to other materials.
5. Cleaning: Dry process, avoiding problems such as cleaning and waste liquid treatment caused by wet etching.
Specification
System Configuration:
Electrical heating
Chamber (Single cavity)
N/A
Lower electrode type
242mm
Process temperature range
-20-100°C
Plasma source
600W-1000W
Process pressure gauge size
100mtorr
Vacuum system
Molecular pump units, dry pump systems, process chamber
The number of etching chambers
Single cavity
Clamps
Type
Size/mm
Material
N/A
8、6、4、3、2
End point detector
Option
Inductively coupled plasma
Option
Technical Parameter：
Etching material
Si、Sio, Sin，Sau，Pt，Al
Etching rate
>20nm/min (Si02 material) The rates of different materials are not the same
Distributed control
>85°
Loading method
Open loading
Gas pipeline controlled by MFC
Six gas tanks are available
Helium backside cooling option
YES
Human-machine interface
Touchscreen operation
Operation mode
Fully automatic mode, non-fully automatic mode
Selection and configuration of automated devices
You can choose either imported or domestic parts
Application Cases
Packing & Delivery
Company Profile
Since 2014，Minder-Hightech is sales and service representative in Semiconductor and Electronic product industry equipment. We are committed to providing customers with Superior, Reliable, and One-Stop Solutions for machinary equipment. Until today, our brand's products have spread to major industrialized countries around the world, helping customers improve efficiency, reduce costs, and improve product quality.
FAQ
1. About Price:
All of our prices are competitive and negotiable. The price varies depending on the configuration and customization complexity of your device.

2. About Sample:
We can provide sample production services for you, but you may provide some fees.

3. About Payment:
After the plan is confirmed, you need to pay us a deposit first, and the factory will start preparing the goods. After the equipment is ready and you pay the balance, we will ship it.

4. About Delivery:
After the equipment manufacturing is completed, we will send you the acceptance video, and you can also come to the site to inspect the equipment.

5. Installation and Debugging:
After the equipment arrives at your factory, we can dispatch engineers to install and debug the equipment. We will provide you with a separate quotation for this service fee.

6. About Warranty:
Our equipment has a 12-month warranty period. After the warranty period, if any parts are damaged and need to be replaced, we will only charge the cost price.

7. After-sale Service:
All machines have a warranty period of over one year. Our technical engineers are always online to provide you with equipment installation, debugging, and maintenance services. We can provide on-site installation and debugging services for special and large equipment.

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