





|
Plasmkälla
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RF
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Ström
|
ICP
|
_
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BIAS
|
1000W(valfritt)
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Tillämpningsområde
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4~8 tum
|
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Antal enskilda bearbetningsplattor
|
1
|
||
|
Utseendet
|
850mmx900mmx1850mm
|
||
|
Systemkontroll
|
PLC
|
||
|
Automationsnivå
|
Manual
|
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