





|
Sumber plasma
|
RF
|
||
|
Daya
|
ICP
|
_
|
|
|
BIAS
|
1000W(opsi)
|
||
|
Ruangan Penerapan
|
4~8 inci
|
||
|
Jumlah irisan pengolahan tunggal
|
1
|
||
|
Dimensi penampilan
|
850mmx900mmx1850mm
|
||
|
Kontrol sistem
|
PLC
|
||
|
Tingkat Otomatisasi
|
Manual
|
||








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