






|
Plasma
|
RF
|
RF
|
||
|
Daya
|
ICP
|
1000W
|
1000W
|
|
|
BIAS
|
600w(opsi)
|
600w(opsi)
|
||
|
Ruangan Penerapan
|
4~8 inci
|
4~8 inci
|
||
|
Jumlah irisan pengolahan tunggal
|
1
|
2
|
||
|
Dimensi penampilan
|
1080x1840x1800mm
|
1340x2050x1800mm
|
||
|
Kontrol sistem
|
Sistem kontrol industri
|
Sistem kontrol industri
|
||
|
Tingkat Otomatisasi
|
otomatis
|
otomatis
|
||






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